Nanoelectronics and MEMS Laboratory was established under the National Electronics and Computer Technology Center (NECTEC). The main objectives are to induce dynamics in R&D and applications of Micro-Electro-Mechanical Systems (MEMS) including nanotechnology in order to support technology development and adoption in electronics such as nanosensor, Lab-on-a-chip, microfabrication, and MEMS devices. This is achieved through establishing research programs, which include funding and program management, as well as establishing central research laboratory in collaboration with universities and other government agencies.

Mission

• To research and develop MEMS and nanoelectronics technology by focusing on innovative research and being a central laboratory also providing both domestic and international linkage between research communities, academic organizations, and industries through the established clusters.
• To transfer technology acquiring from research and development through academic communities and industries.
• To coordinate and facilitate strategic collaboration and linkage between various research units, educational institutions, industrial sector and related international institutions.

Core Competency and Infrastructure

MEMS open laboratory is state of the art laboratory in field of MEMS and microfabrication consisted of design and simulation capability, microfabrication and packaging capability, and Testing& characterization capability.

• Layout Design: MEMS devices are designed by L-Edit, AutoCAD and Cadence including MEMS design library for faster delivery and shorten time to market of MEMS product.

• Computer Simulation: To shorten product developing time and lower prototyping cost, our MEMS device’s behavior was simulated using commercial available and best practice simulation software eg. CoventorWare, Ansys.

• Microfabrication and Testing: State-of-the-art cleanroom and microfabrication facilities are available eg. Micro system analyzer, White light interferometer, Laser doppler vibrometer (Polytec MSA400), Double side mask aligner (Suss MJB4), Dicing machine (ADT), Wire bonder (K&S), Spin coater (Laurell), Thin-film sputtering system, Oxygen plasma cleaner, Micromanipulator, Three zone furnace, Critical Point Dryer, Electroplating system, Potentiostat.

Ongoing Projects

Scanning electron micrograph (SEM), cantilever array sensors: cantilever beam array

• Research and Development of Cantilever based Biosensor: Sensor arrays developed from MEMS for chemical measurement have gained more attention from researchers around the world.  However, there has not been any leader in this sensor array technology.  It is an excellent opportunity for Thai researchers to develop a sensor array chip, apply it to the national major industries such as agriculture and food technology, and become the leader in these fields.  There are three key techniques in the development of sensor array chip: gas sensing, biosensing, and multiple molecular sensing.  Gas sensor detects chemical in gaseous state.  Biosensor distinguishes specific microorganism.  Multiple molecular sensors use a sensing agent that can detect various types of chemical based on different responses that occur.  The sensing mechanism is based on the learning process of human’s olfaction.  The development of sensor array chip integrates the knowledge in several fields, including synthetic chemistry, analytical chemistry, physics, surface engineering, electrical engineering, and computer engineering.  Therefore it is a collaborative project among NSTDA researchers and experts from other institutes.

Miniature microendoscope/endoscope for clinical and intravital imaging applications

• Miniature microendoscope/endoscope for clinical and intravital imaging applications: The image on the left shows a portable microendoscope based on a MEMS 2-D scanner, compound gradient refractive index micro-lenses and a photonics bandgap fiber (PBF). It overcomes the size (2.0 x 1.9 x 1.1 cm³) and weight (less than 3 grams) limitations of conventional two-photon fluorescence microscopy toward freely moving subjects. The microendoscope utilizes a photonic bandgap fiber for laser excitation and large core fiber for fluorescence collection. The image on the right shows MEMS 2-D scanner based near infrared fluorescence dual-axes confocal microscope in a 10-mm diameter package for three-dimensional imaging capability in both ex vivo and in vivo samples. The miniature probe can simply be placed into contact with the target tissue to reveal sub-surface histological images as deep as 300 µm. The probe demonstrates a blood vessels image with the maximum field of view (FOV) of 800 x 450 µm².

• Printed Electronics: Microsystem technology on silicon yet high cost , complicated and time-consuming has been widely standard for integrated circuit and sensor fabrication . Printed electronic is becoming  an alternative technology for simple , extremely low cost and less time-consuming for integrated circuit and sensor fabrication. Our interests encompass synthesis of newly polymeric and conductive semiconductor , fabricating biosensors, agricultural sensors, transducers, integrated circuits and MEMS using new techniques such as inkjet printing and self-assembly printing. Currently we are working on inkjet printed saliva glucose sensor, self-assembly carbon nanotube printing for self assemble nanotransistor and biosensor applications and inkjet printing guided electrospinning technology.

Synthesized CNT by CVD technique

• Carbon Nanotube (CNT) based Gas Sensor: The aim of this project is to develop of high-sensitivity micro gas sensor utilizing nanotechnology. In this project, fabrication facility including chemical vapor deposition system (CVD) for carbon nanotube and other nanostructures will be constructed. CNTs will be then synthesized in various forms. Next, CNTs based gas sensor including CNT-metal oxide and CNT-polymer composite will be fabricated. The CNTs based gas sensors will be characterized toward different gases such as methane and alcohol. These sensors are expected to exhibit high sensitivity with lower operating temperature desirable for various gas sensing applications. In the future, the production cost of these sensors will be minimized for commercialization.

NECTEC portable electronic nose

• Research and Development of Electronic Olfactory Sensing System by Sensor Array Technology: The objective of this R&D project is to enhance the capability to manufacture gas micro sensors using combined sensor technologies. The main application is an odor sensor to be utilized in an electronic olfactory sensing system which is applicable to food industries, health control, or environment monitor. For food industries, an odor sensor can be used to indicate the quality of the product whether the food is fresh or rotten. In health control, an odor sensor can detect the alcohol level at higher accuracy than the conventional alcohol detector. An assembled sensitive sensor device can be built from an array of odor sensors. Our priority task in this project is to develop a sensitive sensor system prototype for quality control in local food industry.

NECTEC fabricated polymer Lab-on-a-chips

• Research and Development of Lab-on-a-Chip: This project aims to build a lab-on-a-chip from polymer-based materials such as Polydimethylsiloxane (PDMS).  A diagnostic kit can be constructed by applying MEMS and microfluidic technology.  First, the chip pattern is designed and printed on a master by photolithography method.  This master is used as a micro mold to cast a polymer chip via thermal polymerization. Then the patterned PDMS is bonded to a glass or polymer substrate.  Finally, the lab-on-a-chip with specific microchannel is obtained.  This lab-on-a-chip serves as a low cost micro-scale experiment.  Examples of lab-on-a-chip are Capillary Electrophoresis Chip and DNA Diagnostic Chip.

• Flow injection based microfluidic device with carbon nanotube electrode for rapid salbutamol detection: A microfabicated flow injection device has been developed for in-channel electrochemical detection (ECD) of a β-agonist, namely salbutamol. The microfluidic system consists of PDMS (polydimethylsiloxane) microchannel and electrochemical electrodes formed on glass substrate. The carbon nanotube (CNT) on gold layer as working electrode, silver as reference electrode and platinum as auxiliary electrode were deposited on a glass substrate. Silver, platinum, gold and stainless steel catalyst layers were coated by DC-sputtering. CNTs were then grown on the glass substance by thermal chemical vapor deposition (CVD) with gravity effect and water-assisted etching. PDMS microchannels fabricated by SU-8 molding and casting were then bonded on glass substrate by oxygen plasma treatment. Flow injection and ECD of salbutamol was performed with the amperometric detection mode for in-channel detection of salbutamol. The influences of flow rate, injection volume, and detection potential on the response of current signal were optimized. Analytical characteristics, such as sensitivity, repeatability and dynamic range have been evaluated. Fast and highly sensitive detection of salbutamol have been achieved. Thus, the proposed combination of the efficient CNT electrode and miniaturized lab-on-a-chip is a powerful platform for β-agonists detection.

NECTEC fabricated CE chips

• Capillary Electrophoresis Chips: Capillary electrophoresis (CE) is a powerful technique for bio-chemical analysis. The technique is designed to separate species based on their size to charge ratio. The recent development of micro-fabricated capillary electrophoresis chip (CE-chip) is very attractive due to its fast analysis, high efficiency, low reagent consumption, and portability. Therefore, microchip system offers various applications such as environmental monitoring, clinical diagnostics and food contaminating. Electrochemical detection is the most suited for miniaturization, compatible with microfabrication and offer high selectivity and sensitivity. Thus, the focus of our laboratory is application of CE-chip with carbon nanotube based electrochemical detection for separation and detection of food contaminating.

NECTEC turbidimeter for detection of shrimp virus.

• Multi-channel Detection of Loop-mediated Isothermal Amplification Reaction: The loop-mediated isothermal amplification (LAMP) is the simple and rapid method for nucleic acid amplification which is widely applied due to its capacity to amplify the large amount of target DNA at short time and constant temperature. This reaction produced pyrophosphate as by-product which formed white precipitate of magnesium pyrophosphate in solution, and then the quantitative analysis of initial template DNA was performed by measuring the turbidity of reaction solution. In this work, the laboratory-made apparatus, turbidimeter, for turbidity measurement was presented. The results shown that the apparatus was useful for turbidity measurement of LAMP reaction solution in dilution of Taura syndrome virus (TSV) and White spot syndrome virus (WSSV) in shrimp. The results were confirmed and agreed with gel electrophoresis measurement.

QCM sensor coated with polymer-nanofibers for gas sensing applications.

• Research and Development of Quartz Crystal Microbalance (QCM) based Sensor: In this work, we have developed an inexpensive QCM system that utilizes low cost commercially available quartz crystal resonator. The circuits of the system are designed for be compact and portable. The QCM sensor surface was modified with different sensing materials for various applications including gas sensors and biosensors. Nanomaterials such as polymeric nanofibers, carbon nanotubes, and nanocomposites were selected and then coated on the electrode surface to sense targeted species with high sensitivity.

A droplet based PCR design

• Research and Development of Electrowetting on Dielectric (EWOD) Device for a Droplet Based Polymerase Chain Reaction System: Polymerase Chain Reaction (PCR) technology has been widely used in molecular biology, forensic analysis, evolutionary and medical diagnostic. PCR requirement for point of care application is shorten reaction time and reduces PCR reagent. If the PCR chip can be done by droplet basis, then the analysis system which minimal amount of fluid will be possible. In this work, we describe the simulation and experimental study of a parallel–plate electrowetting on dielectric (EWOD) based PCR device. The EWOD device is applied to control PCR reagent and sample for a polymerase chain reaction (PCR) system. The EWOD-based PCR system consists of serpentine-shape microheater integrated underneath to maintain temperature at each stage and microchannel. DNA was driven by moving droplet through each square electrode that maintains temperature at denaturation, annealing, and extension region. The fluid dynamics of the device have been modeled by Coventorware, a commercially available MEMS simulation software, to show temperature distribution on each electrode in order to be used as a pattern model for device fabrication.

Members of Nanoelectronics and MEMS Laboratory

Lab Director

Dr.Adisorn         Tuantranont

Researcher

Dr.Anurat          Wisitsora-at

Dr.Wibool          Piyawattanametha

Dr.Pornpimol     Sritongkham

Tanom              Lomas

Assistant Researcher

Wattanasit         Pimpao

Apichai              Jomphoak

Thitima             Maturos

Kata                  Jaruwongrungsee

Suriya               Mongpraneet

Assawapong      Sappat

Tawee              Pogfai

Chanpen            Karuwan

Natthapol          Watthanawisuth

Ditsayut            Phokharatkul

Chavis               Srichan

Nuttapon           Poncharernpong

ISI indexed and Refereed Journals

1. C. Karuwan, T. Maturos, D. Phokharatkul, A. Sappat, K. Jaruwongrungsee, T. Lomas, A. Wisitsoraat, A. Tuantranont, “Flow injection based microfluidic device with carbon nanotube electrode for rapid salbutamol detection,” Talanta, Accepted for Publication, 2009

1. T. Lomas, A. Wisitsorrat, F. Chevasuvit, A. Tuantranont, “ A precision hot embossing mold fabricated by high-resolution powder blasting with polydimethylsiloxane and SU-8 masking technology,” J. Micromechanics and Microengineering, vol. 19(3), 19 035002 (6pp)   doi: 10.1088/0960-1317/19/3/035002, march, 2009

1. E. Dumsong, N. Afzulpurkar, A. Tuantranont, “Design, Analytical Modelling, and Simulation of Wirefree Walking Scratch-drive Microrobot,” IEEE Transaction of Industrial Electronics, DOI: 10.1109/TIE.2008.2005705, 2009.

1. A. Wisitsoraat, A. Tuantranont, V. Patthanasettakul, and T. Lomas,” Fabrication and Characterization of Carbon Doped Molybdenum Oxide Nanostructures,” J. Nanosciences and Nanotechnology. 9, pp. 897-900, Feb, 2009.

1. C. Wongchoosuk, S. Choopun, A. Tuantranont, T. Kerdcharoen, “Au-doped Zinc Oxide Nanostructure Sensors for Detection and Discrimination of Volatile Organic Compounds,” Materials Research Innovations, Article in Press, 2009.

1. A. Wisitsoraat, A. Tuantranont, E. Comini, G. Sberveglieri, W. Wlodarski, “Characterization of N-type and P-Type Semiconductor Gas Sensors based on NiO_x doped TiO₂ Thin Films,” Thin Solid Films, Vol. 517, No. 8, pp. 2775-2780 , 2009.

1. A. Nisar, N. Afzulpurkar, A. Tuantranont, B. Mahaisavariya, “Transient, Three Dimensional, Multifield Analysis of a Piezoelectric Micropump for Drug Delivery System for Treatment of Hypertension,” Cardiovascular Engineering: An International Journal, Vol. 8 (4), pp. 203-218, 2008.

1. S. Chaisitsak, A.Tuantranont, “Effect of the Deposition Condition for Carbon Nanotube Thin Films on Gas Sensing Performance,” Sensor Letter, Accepted, 2008.

1. A. Wisitsoraat, A. Tuantranont, V. Patthanasettakul and S. Mongpraneet, “Electron Field Emission from ZnOx-Nanoparticle Decorated Vertically Aligned Carbon Nanotubes Prepared by Vapor Phase Transport” Journal of Vacuum Science and Technology B 26(5), pp. 1757-1760, September 2008.
2. T. Pogfai, K. Wong-ek, S. Mongpraneet, A. Wisitsoraat, A. Tuantranont, “Low cost and portable PCR thermoelectric cycle,” International Journal of Applied Biomedical Engineering, 1, 41-45, 2008
3. A. Nisar, N. Afzulpurkar, B. Mahaisavariya, A.Tuantranont, “Multifield Analysis of a Piezoelectrically Actuated Valveless Micropump,” Sensors and Transducers Journal, Vol. 94, Issue 7, pp.176-195, July 2008.
4. A. Tuantranont, T. Lomas, K. Jaruwongrungsee, A. Jompheuk, A. Wisitsoraat, “Symmetrical PolyMUMPs-based Piezoresistive Microcantilever Sensors with On-chip Temperature Compensation for Microfluidics Applications,” IEEE Sensor Journal, Vol. 8, No. 5, pp. 543-547, May 2008.
5. A. Nisar, N. Afzulpurkar, B. Mahaisavariya, A.Tuantranont, “MEMS-based Micropumps in Drug Delivery and Biomedical Applications,” Sensors and Actuators B: Chemical, Vol. 130, No. 2, pp. 947-942, March 2008.
6. S. Chaisitsak, J. Nukeaw, A.Tuantranont, “Parameter Study of Atmospheric-pressure Single-walled Carbon Nanotubes Growth by Ferrocene-ethanol Mist,” Diamond and Related Materials, Vol. 16, pp. 1958-1966, 2007.
7. W. Limbut, S. Loyprasert, C. Thammakhet, P. Thavarungkul, A. Tuantranont, P. Asawatreratanakul, C. Limsakul, B. Wongkittisuksa, P. Kanatharana, “Microfluidic conductimetric bioreactor,” Biosensors and Bioelectronics, Vol. 22, No.12, pp. 3064-3071, 2007.
8. A. Wisitsoraat, V. Patthanasetakul, T. Lomas, A. Tuantranont,” Low cost thin film based piezoresistive MEMS tactile sensor,” Sensors and Actuators A: Physical, vol. 139, pp. 17-22, 2007.
9. A. Tuantranont, T. Lomas, T. Maturos, A. Wisitsoraat, P. Thavarungkul, P. Kanatharana, W. Limbut, S. Loyprasert, “Development of Low-cost Microfluidic Systems for Lab-on-a-chip Biosensor Applications,” NanoBiotechnology, Vol. 2, No. 3-4, pp. 143-149, 2006.
10. Y. Wanna, N. Srisukhumbowornchai, A. Tuantranont, A. Wisitsoraat, N. Thavarungkul, and P. Singjai, “The Effect of Carbon Nanotube Dispersion on CO Gas Sensing Characteristics of Polyaniline Gas Sensor,” Journal of Nanoscience and Nanotechnology, Vol. 6, pp. 1-4, 2006.
11. A. Wisitsoraat, A. Tuantranont, C. Thanachayanont, V. Patthanasettakul, P. Singjai, "Electron beam evaporated carbon nanotube dispersed SnO₂ thin film gas sensor" Journal of Electroceramics 17, pp. 45-49, 2006.
12. A. Tuantranont, S. Rahong, A. Wisitsoraat, N. Prontheerapat and T. Lomas, “Glass Micromachining by Powder Blasting for Microfluidic Application,” International Journal for Manufacturing Science and Technology, Vol. 9, No.1, pp. 83-86, 2006.
13. A. Tuantranont, K. Hemarat and A. Wisitsoraat, ”Simulation of Curl Compensation in MEMS Micromirror,” Journal of Physics, Vol. 34, pp. 168-173, 2006.
14. W. Mamanee, A. Tuantranont, N. V. Afzulpurkar, N. Porntheerapat, S. Rahong and A. Wisitsoraat, “PDMS Based Thermopnuematic Peristaltic Micropump for Microfluidic Systems,” Journal of Physics, Vol. 34, pp. 564-567, 2006.
15. A. Wisitsoraat, A. Tuantranont, and T. Lomas, “Design and Simulation of Electro-fabricated MEMS Micro-hotplate for Gas Sensor Applications,” Journal of Physics, Vol. 34, pp. 183-188, 2006.
16. A. Wisitsoraat, A. Tuantranont, V. Patthanasettakul, T. Lomas, and P. Chindaudom, “Ion-assisted e-beam evaporated gas sensor for environmental monitoring,” Journal of Science and Technology of Advanced Materials, Vol. 6, pp. 261-265, 2005.
17. A. Tuantranont, “Nanobiotechnology: Miniaturized Medical Lab-on-a-Chip” Journal of the Medical Technologist Association of Thailand, Vol. 33(1), 2005.
18. J. Zhang, Y. C. Lee, A. Tuantranont, V.M. Bright, “Thermal analysis of micromirrors for high-energy applications,” IEEE Transactions on Advanced Packaging, Vol. 26(3), pp. 310-317, 2003.
19. K. Ishikawa, J. L. Zhang, A. Tuantranont, V. M. Bright, and Y. C. Lee, “An Integrated Micro-optical System for VCSEL-to-fiber Active Alignment,” Sensors and Actuators A Journal 103, pp. 109-115, 2003.
20. A. Tuantranont and V. M. Bright, “Segmented Silicon-Micromachined Microelectromechanical Deformable Mirrors for Adaptive Optics,” Invited Paper: Journal of Selected Topics in Quantum Electronics, Vol.8, No.1, pp. 33-45, Jan/Feb 2002.
21. A. Tuantranont, V. M. Bright, J. Zhang, W. Zhang, J. Neff, and Y. C. Lee, "Optical Beam Steering Using MEMS-Controllable Microlens Array," Sensors and Actuators A Journal 3021, pp.1-10, 2001.
22. A. Tuantranont, L. A. Liew, V. M. Bright, W. Zhang, and Y. C. Lee, "Phase-Only Micromirror Array Fabricated by Standard CMOS Process," Sensors and Actuators A Journal 89, pp. 124-134, 2001.
23. A. Tuantranont, V. M. Bright, J. L. Zhang, W. Zhang, J. Neff, and Y. C. Lee, "MEMS-Controllable Microlens Array for Beam Steering and Precision Alignment in Optical Interconnect Systems," Optics & Information Systems SPIE’s International Technical Group Newsletter: Optical MEMS Special Issue, pp.10-12, 2000.
24. L. A. Liew, A. Tuantranont, V. M. Bright, W. Zhang, and Y. C. Lee, A. Tuantranont, T. Lomas, and V. M. Bright, “"Thermal Analysis of CMOS Micromirror’s Multi-morph Actuators," Microelectronics Journal, Vol. 31, pp.791-801, 2000.